Title :
Analysis of CMOS 0.13µm test structures for 0.6 to 1.5 THz imaging
Author :
Domingues, Suzana ; Perenzoni, Daniele ; Giliberti, Valeria ; Di Gaspareb, Alessandra ; Ortolani, Michele ; Perenzoni, Matteo ; Stoppa, David
Author_Institution :
Center for Mater. & Microsyst, Fondazione Bruno Kessler (FBK), Trento, Italy
Abstract :
Test structures comprehending several combinations of FET detector sizes and bow-tie antennas were designed and fabricated in a 0.13 μm standard CMOS technology. Measurement results from these structures provide a quantitative comparison basis for the design of a future real-time high-frame rate THz camera, providing an insight on the optimization of the FET size.
Keywords :
CMOS integrated circuits; bow-tie antennas; field effect transistors; terahertz wave imaging; CMOS; FET detector sizes; THz camera; THz imaging; bow-tie antennas; frequency 0.6 THz to 1.5 THz; test structures; Antennas; CMOS integrated circuits; Detectors; Field effect transistors; Frequency measurement; Impedance; Semiconductor device measurement;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on
Conference_Location :
Mainz
DOI :
10.1109/IRMMW-THz.2013.6665619
