Title :
Terahertz transceiver microprobe for chip-inspection applications using optoelectronic time-domain reflectometry
Author :
Nagel, Michael ; Matheisen, Christopher ; Sawallich, Simon ; Dobritz, Stephan ; Kurz, H.
Author_Institution :
AMO GmbH, Aachen, Germany
Abstract :
In this work a compact microprobe for advanced chip-inspection applications is introduced. The probe features integrated photoconductive switches for Terahertz pulse generation and detection. Device application is demonstrated for contact-free high-resolution time-domain reflectometry measurements at silicon-chip test structures.
Keywords :
inspection; integrated circuit testing; integrated optoelectronics; photoconducting switches; pulse generators; time-domain reflectometry; transceivers; chip-inspection applications; integrated photoconductive switches; optoelectronic time-domain reflectometry; silicon-chip test structures; terahertz pulse detection; terahertz pulse generation; terahertz transceiver microprobe; Coplanar waveguides; Optical switches; Optical waveguides; Probes; Reflection; Time-domain analysis; Transmission line measurements;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on
Conference_Location :
Mainz
DOI :
10.1109/IRMMW-THz.2013.6665732
