Title :
Semiconducting Y-Ba-Cu-O thermal detectors: Low noise and fast pyroelectric IR response - Development for future THz imagers
Author :
Galiano, X. ; Kreisler, Alain J. ; Jagtap, V.S. ; Degardin, Annick F.
Author_Institution :
SUPELEC/LGEP, UPMC Univ. Paris 06, Gif-sur-Yvette, France
Abstract :
YBa2Cu3O6+x (YBCO) oxides are semiconductors (SC) at low oxygen content. IR detectors were processed with amorphous SC films, either planar or metal/YBCO/metal tri-layers. The response at 850 nm exhibited a low noise and fast pyroelectric behavior. THz detectors with planar antennas are considered.
Keywords :
barium compounds; image sensors; infrared detectors; planar antennas; pyroelectric detectors; semiconductor device noise; submillimetre wave detectors; submillimetre wave imaging; temperature sensors; terahertz wave detectors; terahertz wave imaging; thin film sensors; yttrium compounds; IR detector; THz detector; YBa2Cu3O6+x; amorphous SC film; future THz imager; metal-YBCO-metal trilayer; noise; planar antenna; pyroelectric IR response; semiconducting thermal detector; size 850 nm; Detectors; Noise; Performance evaluation; Silicon; Substrates; Yttrium barium copper oxide;
Conference_Titel :
Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2013 38th International Conference on
Conference_Location :
Mainz
DOI :
10.1109/IRMMW-THz.2013.6665745