Title :
Pulse Plasma-Chemical Synthesis of Ultradispersed Powders of Titanium and Silicon Oxide
Author :
Ponomarev, Denis V. ; Remnev, Gennady E. ; Sazonov, Roman V. ; Kholodnaya, Galina E.
Author_Institution :
Inst. of High-Technol. Phys., Nat. Res. Tomsk Polytech. Univ., Tomsk, Russia
Abstract :
This paper is devoted to studying the plasma-chemical synthesis of nanosized SiO2 and TiO2 powders and to the analysis of their major characteristics. The nanosized powder was synthesized in the plasma-chemical reactor using a pulse electron beam to generate low-temperature plasma. The synthesized powders were studied by the transmission electron microscopy to determine the morphology and the size of the nanosized powder with respect to by-products of the reaction. The elemental composition was studied using the Oxford ED2000 X-ray fluorescent spectrometer. To determine the crystal structure of the nanosized powder, we used the standard technology of X-ray phase analysis. The reaction products were processed using Shimadzu XRD-6000/7000. The substances included in the composition of the nanosized powder were identified using Nicolet 5700 Fourier transform infrared spectrometer.
Keywords :
Fourier transform spectra; X-ray chemical analysis; crystal structure; infrared spectra; nanofabrication; nanoparticles; plasma materials processing; powders; silicon compounds; titanium compounds; transmission electron microscopy; FTIR; Nicolet 5700 Fourier transform infrared spectrometer; Oxford ED2000 X-ray fluorescent spectrometer; Shimadzu XRD-6000/7000; SiO2; TEM; TiO2; X-ray phase analysis technology; crystal structure; elemental composition; low-temperature plasma; nanosized powder composition; nanosized powder morphology; nanosized silica powders; nanosized titania powders; plasma-chemical reactor; pulse electron beam; pulse plasma-chemical synthesis; reaction byproducts; transmission electron microscopy; ultradispersed powders; Chemicals; Crystals; Educational institutions; Electron beams; Hydrogen; Inductors; Powders; Metal-organic precursors; nanosized silicon dioxide; nanosized titanium dioxide; pulse electron beam;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2013.2273559