ANOVA model based moving window approach for RtR control in high-mix semiconductor manufacturing industry

In this work, a new state estimation method based on run-to-run control for high-mix semiconductor manufacturing industry is proposed. This algorithm exerts moving window approach on the analysis of variance (ANOVA) model, MW-ANOVA approach, and employs the right pseudo-inverse of the context matrix to provide better estimate of the relative states including disturbances of each product and tool at next run. This approach takes the commonly encountered non-stationary disturbances, i.e., an integrated moving average with first order IMA(1,1) disturbance, into account. Comparing to the traditional t-EWMA algorithm, it provides better control performance, which can be verified by simulation examples.