Modeling of a planar motion stage for precision positioning

In this contribution we develop a physical model for a non contact, high-precision Lorentz force planar motion stage of linear DC brushless type. We derive physical models of the relevant components and investigate sources and influences of various parasitic effects and disturbances. For the latter, phenomenological models are developed that capture the behavior observed throughout experiments. The position dependency of the Lorentz forces is reduced by a minimum power commutation. Finally, model characteristics and parameters are identified from experimental test rig data.