Micro-fabrication of an absolute flow calorimeter for DC to RF power measurement

Micro-fabricated calorimeters have been extensively used for determination of thermo chemical values and reaction kinetic studies. However, micro-fabricated calorimeters as power sensors have been mostly unexplored. In this context, miniaturization of an absolute flow calorimeter capable of measuring DC to RF power is proposed. In this paper, a micro-fabricated flow calorimeter is demonstrated and several initial test results, such as DC power measurement and the impact of flow rate on heat transferring, are reported. The obtained results will play an important role in performing RF power measurements in the future.