Title :
Investigation of high gigahertz acoustic phonon lifetimes in thin silicon membranes
Author :
Schubert, Martin ; Grossmann, M. ; Klingele, Matthias ; Ristow, O. ; Hettich, M. ; Dekorsy, T.
Author_Institution :
Dept. of Phys., Univ. Konstanz, Konstanz, Germany
Abstract :
Acoustic properties of materials in the high gigahertz range are still barely understood, even for well characterized materials like silicon. Acoustic phonons play an important role in dephasing processes as well as in thermal transport in general. Silicon thin films are widely used in the semiconductor microelectronics industry. By measuring the phonon lifetimes in silicon membranes, we hope to further the understanding of thermal transport processes in these systems.
Keywords :
acoustic wave effects; elemental semiconductors; membranes; phonons; semiconductor thin films; silicon; Si; acoustic properties; dephasing processes; high gigahertz acoustic phonon lifetimes; semiconductor microelectronics industry; silicon thin films; thermal transport; thin silicon membranes;
Conference_Titel :
Thermal Investigations of ICs and Systems (THERMINIC), 2013 19th International Workshop on
Conference_Location :
Berlin
Print_ISBN :
978-1-4799-2271-0
DOI :
10.1109/THERMINIC.2013.6675211