DocumentCode
650101
Title
Modeling and fabrication of low cost MEMS varactor for filter applications
Author
Pavan, F.R.M. ; Rehder, G.P. ; Carreno, Marcelo Nelson Paez
Author_Institution
Lab. of Microelectron., Univ. of Sao Paulo, Sao Paulo, Brazil
fYear
2013
fDate
2-6 Sept. 2013
Firstpage
1
Lastpage
4
Abstract
A low cost concept of a RF MEMS varactor for integration in a selectable-band patch filter is proposed, modeled and fabricated, with initially good results. A lumped element model is used to allow the simulation of the eletromechanical behavior of the MEMS varactor with the RF response of the patch filter. The first fabrication results show promising possibilities for the integration of the MEMS varactor (fabricated with microelectronics processing) and the patch filter (fabricated with printed circuit board technology) using a flip-chip process.
Keywords
flip-chip devices; micromechanical devices; printed circuits; radiofrequency filters; varactors; RF MEMS varactor; RF response; eletromechanical behavior; flip-chip process; lumped element model; microelectronics processing; printed circuit board technology; selectable-band patch filter; Flip-chip integration; RF MEMS varactor; tunable patch filter;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics Technology and Devices (SBMicro), 2013 Symposium on
Conference_Location
Curitiba
Print_ISBN
978-1-4799-0516-4
Type
conf
DOI
10.1109/SBMicro.2013.6676133
Filename
6676133
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