Title :
Modeling and fabrication of low cost MEMS varactor for filter applications
Author :
Pavan, F.R.M. ; Rehder, G.P. ; Carreno, Marcelo Nelson Paez
Author_Institution :
Lab. of Microelectron., Univ. of Sao Paulo, Sao Paulo, Brazil
Abstract :
A low cost concept of a RF MEMS varactor for integration in a selectable-band patch filter is proposed, modeled and fabricated, with initially good results. A lumped element model is used to allow the simulation of the eletromechanical behavior of the MEMS varactor with the RF response of the patch filter. The first fabrication results show promising possibilities for the integration of the MEMS varactor (fabricated with microelectronics processing) and the patch filter (fabricated with printed circuit board technology) using a flip-chip process.
Keywords :
flip-chip devices; micromechanical devices; printed circuits; radiofrequency filters; varactors; RF MEMS varactor; RF response; eletromechanical behavior; flip-chip process; lumped element model; microelectronics processing; printed circuit board technology; selectable-band patch filter; Flip-chip integration; RF MEMS varactor; tunable patch filter;
Conference_Titel :
Microelectronics Technology and Devices (SBMicro), 2013 Symposium on
Conference_Location :
Curitiba
Print_ISBN :
978-1-4799-0516-4
DOI :
10.1109/SBMicro.2013.6676133
