• DocumentCode
    650105
  • Title

    Study of the optical properties of the nickel deposited one-dimensional porous silicon photonic crystal

  • Author

    Huanca, D.R. ; Salcedo, Walter J.

  • Author_Institution
    Lab. de Microeletronica, Escola Politec. da Univ. de Sao Paulo, Sao Paulo, Brazil
  • fYear
    2013
  • fDate
    2-6 Sept. 2013
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Thin nickel layer was deposited onto the porous silicon photonic crystal surface and then thermally treated at 900°C. The optical analysis reveals that the shape of the photonic band gap is determined principally by the roughness of the high porosity layer. Nickel presence leads to the suppression of the photonic band gap and it is partially recovered after thermal treatment. The structural characterization shows that after thermal treatment the high porosity layer expands while the low porosity layer contracts, whereas in the upper region of the photonic device, nickel is diffused into the first H and L layers and reacts with silicon to form Ni3Si and Ni31Si12 porous phases. The average size of them is about 24 and 30 nm depending on the nickel silicide phase.
  • Keywords
    electron beam deposition; nickel; photonic band gap; porosity; Ni; Si; electron beam method; nickel layer; optical analysis; optical properties; photonic band gap; porosity; silicon photonic crystal surface; structural properties; temperature 900 degC; thermal treatment; nickel deposition; optical properties; porous silicon photonic crystals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics Technology and Devices (SBMicro), 2013 Symposium on
  • Conference_Location
    Curitiba
  • Print_ISBN
    978-1-4799-0516-4
  • Type

    conf

  • DOI
    10.1109/SBMicro.2013.6676137
  • Filename
    6676137