DocumentCode
650105
Title
Study of the optical properties of the nickel deposited one-dimensional porous silicon photonic crystal
Author
Huanca, D.R. ; Salcedo, Walter J.
Author_Institution
Lab. de Microeletronica, Escola Politec. da Univ. de Sao Paulo, Sao Paulo, Brazil
fYear
2013
fDate
2-6 Sept. 2013
Firstpage
1
Lastpage
4
Abstract
Thin nickel layer was deposited onto the porous silicon photonic crystal surface and then thermally treated at 900°C. The optical analysis reveals that the shape of the photonic band gap is determined principally by the roughness of the high porosity layer. Nickel presence leads to the suppression of the photonic band gap and it is partially recovered after thermal treatment. The structural characterization shows that after thermal treatment the high porosity layer expands while the low porosity layer contracts, whereas in the upper region of the photonic device, nickel is diffused into the first H and L layers and reacts with silicon to form Ni3Si and Ni31Si12 porous phases. The average size of them is about 24 and 30 nm depending on the nickel silicide phase.
Keywords
electron beam deposition; nickel; photonic band gap; porosity; Ni; Si; electron beam method; nickel layer; optical analysis; optical properties; photonic band gap; porosity; silicon photonic crystal surface; structural properties; temperature 900 degC; thermal treatment; nickel deposition; optical properties; porous silicon photonic crystals;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics Technology and Devices (SBMicro), 2013 Symposium on
Conference_Location
Curitiba
Print_ISBN
978-1-4799-0516-4
Type
conf
DOI
10.1109/SBMicro.2013.6676137
Filename
6676137
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