DocumentCode :
650105
Title :
Study of the optical properties of the nickel deposited one-dimensional porous silicon photonic crystal
Author :
Huanca, D.R. ; Salcedo, Walter J.
Author_Institution :
Lab. de Microeletronica, Escola Politec. da Univ. de Sao Paulo, Sao Paulo, Brazil
fYear :
2013
fDate :
2-6 Sept. 2013
Firstpage :
1
Lastpage :
4
Abstract :
Thin nickel layer was deposited onto the porous silicon photonic crystal surface and then thermally treated at 900°C. The optical analysis reveals that the shape of the photonic band gap is determined principally by the roughness of the high porosity layer. Nickel presence leads to the suppression of the photonic band gap and it is partially recovered after thermal treatment. The structural characterization shows that after thermal treatment the high porosity layer expands while the low porosity layer contracts, whereas in the upper region of the photonic device, nickel is diffused into the first H and L layers and reacts with silicon to form Ni3Si and Ni31Si12 porous phases. The average size of them is about 24 and 30 nm depending on the nickel silicide phase.
Keywords :
electron beam deposition; nickel; photonic band gap; porosity; Ni; Si; electron beam method; nickel layer; optical analysis; optical properties; photonic band gap; porosity; silicon photonic crystal surface; structural properties; temperature 900 degC; thermal treatment; nickel deposition; optical properties; porous silicon photonic crystals;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics Technology and Devices (SBMicro), 2013 Symposium on
Conference_Location :
Curitiba
Print_ISBN :
978-1-4799-0516-4
Type :
conf
DOI :
10.1109/SBMicro.2013.6676137
Filename :
6676137
Link To Document :
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