Title :
Thermal flow sensor integrated to PDMS-based microfluidic systems
Author :
Mielli, Murilo Zubioli ; Carreno, Marcelo Nelson Paez
Author_Institution :
EPUSP, LME, Univ. of Sao Paulo, Sao Paulo, Brazil
Abstract :
This paper presents the development of a thermal flow sensor integrated to a microchannel aiming its application in biological and chemical systems. The sensor is composed by a thin-film nickel heater deposited on a glass slice by electroplating and a microchannel fabricated on PDMS by soft lithography. Computer simulations were utilized to determine the electrical behavior of the sensor and the temperature distribution. The results show the sensor presents adequate sensibility with low interference in the fluid flow and its fabrication can be easily introduced in the standard fabrication process of PDMS-based microsystems.
Keywords :
electroplating; flow measurement; glass; microchannel flow; microfabrication; microsensors; nickel; polymer films; soft lithography; temperature distribution; temperature sensors; thin film sensors; Ni; PDMS-based microfluidic system; biological system; chemical system; electroplating; fluid flow; glass slice; microchannel fabrication; soft lithography; standard fabrication process; temperature distribution; thermal flow sensor; thin film nickel heater; PDMS; flow sensor; microfluidics;
Conference_Titel :
Microelectronics Technology and Devices (SBMicro), 2013 Symposium on
Conference_Location :
Curitiba
Print_ISBN :
978-1-4799-0516-4
DOI :
10.1109/SBMicro.2013.6676148
