Title :
Guest Editorial Special Section on the 2012 International Symposium on Semiconductor Manufacturing
Author_Institution :
Engineering Department, Toshiba Microelectronics Corporation, Image Sensor LSI Division, Image Sensor Product, Kanagawa, Japan
Abstract :
This special section presents extended versions of ten papers that were selected from papers presented at the 2012 International Symposium on Semiconductor Manufacturing.
Keywords :
Meetings; Semiconductor device manufacture; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2013.2271797
