Title :
Corrections to “Multifunction Thermopile Sensors Fabricated With a MEMS-Compatible Process” [May 13 242-247]
Author :
Sin, Li-min ; Pan, Tai-Tou ; Tsai, Chun-Wei ; Chou, Cheng-Fu ; Hong, Jia-qi ; Tsai, Jen-Chieh
Abstract :
In the above paper (ibid., vol. 26, no. 2, pp. 242-247, May 2013), changes should have been reflected in the final, published work, but were not. These changes are presented here.
Keywords :
Gas detectors; Humidity; Micromechanical devices; Temperature sensors;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2013.2272113
