DocumentCode
65142
Title
Corrections to “Multifunction Thermopile Sensors Fabricated With a MEMS-Compatible Process” [May 13 242-247]
Author
Sin, Li-min ; Pan, Tai-Tou ; Tsai, Chun-Wei ; Chou, Cheng-Fu ; Hong, Jia-qi ; Tsai, Jen-Chieh
Volume
26
Issue
3
fYear
2013
fDate
Aug. 2013
Firstpage
430
Lastpage
430
Abstract
In the above paper (ibid., vol. 26, no. 2, pp. 242-247, May 2013), changes should have been reflected in the final, published work, but were not. These changes are presented here.
Keywords
Gas detectors; Humidity; Micromechanical devices; Temperature sensors;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2272113
Filename
6572872
Link To Document