• DocumentCode
    65200
  • Title

    Compensation of Mechanical Stress-Induced Drift of Bandgap References With On-Chip Stress Sensor

  • Author

    Motz, Mario ; Ausserlechner, Udo ; Holliber, Michael

  • Author_Institution
    Infineon Technol. Austria AG, Villach, Austria
  • Volume
    15
  • Issue
    9
  • fYear
    2015
  • fDate
    Sept. 2015
  • Firstpage
    5115
  • Lastpage
    5121
  • Abstract
    Today´s smart sensor systems rely heavily on bandgap circuit techniques to achieve the required high accuracy. However, all presently known bandgap references show a notable lifetime drift of ~1 mV caused by instable mechanical stress in common plastic encapsulated packages. This paper proposes a versatile digital stress compensation scheme which works for arbitrary packages and silicon technologies. It uses a new mechanical stress sensor to measure the sum of in-plane normal stress components. The mechanical stress drifts of bandgap reference, stress, and temperature sensors were characterized on wafer stripes in a four-point bending fixture. With these results a compensation algorithm was derived. Mechanical stress drifts were provoked by thermal cycling measurements on samples in a quad flat no leads-like plastic encapsulated package after moisture soaking. These measurements show that the mechanical stress related drift of a Brokaw bandgap voltage can be reduced by about one order in magnitude over the whole automotive temperature range. Due to the low process spread of the proposed stress sensor only a single-trim at room temperature on wafer level is necessary.
  • Keywords
    bending; compensation; elemental semiconductors; encapsulation; fixtures; plastic packaging; silicon; stress measurement; temperature measurement; temperature sensors; Brokaw bandgap voltage; Si; arbitrary packaging; bandgap circuit technique; four-point bending fixture; in-plane normal stress measurement; mechanical stress-induced drift; moisture soaking; on-chip stress sensor; plastic encapsulated packaging; silicon technology; smart sensor system; temperature 293 K to 298 K; temperature sensor; thermal cycling measurement; versatile digital stress compensation scheme; wafer level stripe; Mechanical sensors; Photonic band gap; Resistors; Stress; Temperature measurement; Temperature sensors; Bandgap; bandgap; compensation; mechanical stress; piezo-junction; reference;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2015.2433292
  • Filename
    7107981