Title :
Compensation of Mechanical Stress-Induced Drift of Bandgap References With On-Chip Stress Sensor
Author :
Motz, Mario ; Ausserlechner, Udo ; Holliber, Michael
Author_Institution :
Infineon Technol. Austria AG, Villach, Austria
Abstract :
Today´s smart sensor systems rely heavily on bandgap circuit techniques to achieve the required high accuracy. However, all presently known bandgap references show a notable lifetime drift of ~1 mV caused by instable mechanical stress in common plastic encapsulated packages. This paper proposes a versatile digital stress compensation scheme which works for arbitrary packages and silicon technologies. It uses a new mechanical stress sensor to measure the sum of in-plane normal stress components. The mechanical stress drifts of bandgap reference, stress, and temperature sensors were characterized on wafer stripes in a four-point bending fixture. With these results a compensation algorithm was derived. Mechanical stress drifts were provoked by thermal cycling measurements on samples in a quad flat no leads-like plastic encapsulated package after moisture soaking. These measurements show that the mechanical stress related drift of a Brokaw bandgap voltage can be reduced by about one order in magnitude over the whole automotive temperature range. Due to the low process spread of the proposed stress sensor only a single-trim at room temperature on wafer level is necessary.
Keywords :
bending; compensation; elemental semiconductors; encapsulation; fixtures; plastic packaging; silicon; stress measurement; temperature measurement; temperature sensors; Brokaw bandgap voltage; Si; arbitrary packaging; bandgap circuit technique; four-point bending fixture; in-plane normal stress measurement; mechanical stress-induced drift; moisture soaking; on-chip stress sensor; plastic encapsulated packaging; silicon technology; smart sensor system; temperature 293 K to 298 K; temperature sensor; thermal cycling measurement; versatile digital stress compensation scheme; wafer level stripe; Mechanical sensors; Photonic band gap; Resistors; Stress; Temperature measurement; Temperature sensors; Bandgap; bandgap; compensation; mechanical stress; piezo-junction; reference;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2015.2433292