Fabrication of Prototypal Nanomechanical Resonator Based on a Single Copper Nanowire

Author

Weihong Xu ; Li-Feng Ge

Author_Institution

Nano-Mater. & Environ. Detection Lab., Hefei Inst. of Intell. Machines, Hefei, China

fYear

2013

fDate

20-23 Aug. 2013

Firstpage

1706

Lastpage

1709

Abstract

Nano-scaled cantilevered and doubly clamped nanowires show promise for chemical and biological sensing because of their nano-scale resonance structure, ultra-high natural frequency and mass sensitivity. In this work, we present a doubly clamped nanomechanical resonator based on a single copper nanowire fabricated by using a hybrid process combined with bottom-up and top-down techniques, and investigate the possibility of laser-driven transduction of the nanoresonator.

Keywords

clamps; copper; nanoelectromechanical devices; nanofabrication; nanosensors; nanowires; resonators; transducers; Cu; biological sensing; bottom-up technique; chemical sensing; doubly clamped nanomechanical resonator; doubly clamped nanowire; laser-driven transduction; mass sensitivity; nanoscale resonance structure; nanoscaled cantilever; single copper nanowire; top-down technique; Laser beams; Measurement by laser beam; Nanobioscience; Resonant frequency; Sensitivity; Sensors; Vibrations; farication; mass sensing; nanomechanical resonator; single copper nanowire; transduction;

fLanguage

English

Publisher

ieee

Conference_Titel

Green Computing and Communications (GreenCom), 2013 IEEE and Internet of Things (iThings/CPSCom), IEEE International Conference on and IEEE Cyber, Physical and Social Computing

Conference_Location

Beijing

Type

conf

DOI

10.1109/GreenCom-iThings-CPSCom.2013.313

Filename

6682325