Uncooled and passive 0.5–1.5 THz FPA imager: Design and characterization of focal plane array imager based on antenna-coupled MOSFET bolometers

Author

Shumaker, Evgeny ; Corcos, Dan ; Kaminsky, Noam ; Elad, Danny ; Morf, Thomas ; Klein, Bernhard

Author_Institution

IBM Haifa Res. Lab., Haifa Univ. Campus, Haifa, Israel

fYear

2013

fDate

21-23 Oct. 2013

Firstpage

1

Lastpage

5

Abstract

Radiation in the "THz gap" holds great promise for numerous novel applications from navigation aids to medical imaging. An all-silicon antenna coupled MOSFET bolometer, realized in CMOS-SOI-MEMS process is intended to become a cornerstone of a novel focal-plane-array imager aimed at operation in the 0.5-1.5 THz range. The present article reports on the progress in design and characterization of this innovative sensor.

Keywords

CMOS integrated circuits; MOSFET; bolometers; focal planes; micromachining; micromechanical devices; millimetre wave antennas; millimetre wave imaging; silicon-on-insulator; CMOS-SOI-MEMS process; FPA imager; THz gap; all-silicon antenna coupled MOSFET bolometer; focal-plane-array imager; frequency 0.5 THz to 1.5 THz; radiation; Antenna measurements; Antennas; Imaging; MOSFET; Noise; Optics; Temperature sensors; Bolometers; Micromachining; Microwave imaging; Microwave radiometry; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwaves, Communications, Antennas and Electronics Systems (COMCAS), 2013 IEEE International Conference on

Conference_Location

Tel Aviv

Type

conf

DOI

10.1109/COMCAS.2013.6685254

Filename

6685254