Title :
Wideband planar skirt antenna and its application for the detection of terahertz radiation
Author :
Kaminski, N. ; Corcos, Dan ; Shumaker, Evgeny ; Elad, Danny ; Morf, Thomas ; Klein, Bernhard ; Drechsler, U. ; Despont, Michel
Author_Institution :
IBM Res. - Haifa, Haifa, Israel
Abstract :
A new type of traveling wave antenna is presented. Key features of the antenna are planar, low mass and wide bandwidth of operation. One such antenna was designed for terahertz radiation detection and realized in standard IBM CMOS-SOI process with subsequent MEMS post processing. Measurements performed at 655GHz showed very good agreement with the theoretical predictions based on full wave simulations. The present article describes the antenna physics, design, fabrication and measurement results.
Keywords :
CMOS integrated circuits; antenna theory; broadband antennas; micromachining; planar antennas; radiometry; silicon-on-insulator; submillimetre wave antennas; submillimetre wave imaging; IBM CMOS-SOI process; MEMS post processing; frequency 655 MHz; terahertz radiation detection; terahertz radiation imaging; traveling wave antenna; wideband planar skirt antenna; Antenna measurements; Bandwidth; Bolometers; Imaging; Loaded antennas; Microwave antennas; Antenna theory; Bolometers; Micromachining; Microwave imaging; Microwave radiometry; Receiving antenna;
Conference_Titel :
Microwaves, Communications, Antennas and Electronics Systems (COMCAS), 2013 IEEE International Conference on
Conference_Location :
Tel Aviv
DOI :
10.1109/COMCAS.2013.6685263
