In-situ measurement of dielectric material properties: Perspectives for integrated digitally calibrated built-in-self-sensor solutions

Author

Leyssenne, L. ; Wane, S. ; Germanicus, R. Coq ; Pasquet, Daniel ; Descamps, Philippe ; Lahbib, I. ; Lesenechal, Dominique ; Leclere, P.

Author_Institution

LaMIPS Lab., NXP Semicond., Colombelles, France

fYear

2013

fDate

6-10 Oct. 2013

Firstpage

76

Lastpage

79

Abstract

In this paper, the possibilities for miniaturization of Non-Destructive dielectric measurement systems are proposed based on the concept of Digital-Calibration of integrated BISS (Built-In-Self-Sensor) using advanced SiGe:C technologies. Design, analysis and experimental verification of Built-in-Self-Test probing sensors are presented for characterization of integrated systems and material properties.

Keywords

built-in self test; calibration; dielectric measurement; nondestructive testing; SiGe:C; dielectric material properties; digital calibration; digitally calibrated built-in-self-sensor; in-situ measurement; integrated BISS; integrated built-in-self-sensor; nondestructive dielectric measurement systems; quantitative nanomechanical property mapping; Dielectric materials; Dielectric measurement; Dielectrics; Permittivity; Sensor phenomena and characterization; Voltage-controlled oscillators; Atomic Force Microscopy; Built-In Self Sensor; Integrated Sensors; Non-Destructive Measurement; Wireless Monitoring;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference (EuMC), 2013 European

Conference_Location

Nuremberg

Type

conf

Filename

6686594