A 60 GHz liquid sensing substrate integrated cavity in LTCC

Author

Liu, Siyuan ; Ocket, I. ; Schreurs, Dominique ; Nauwelaers, B. ; De Raedt, W.

Author_Institution

Div. ESAT-TELEMIC, Univ. of Leuven, Leuven, Belgium

fYear

2013

fDate

6-10 Oct. 2013

Firstpage

613

Lastpage

615

Abstract

This paper presents a 60 GHz liquid sensing cavity resonator realized in LTCC technology for liquid sensing applications, such as in lab-on-chip microfluidics. The LTCC cavity senses the liquid through means of an opening in the cavity´s bottom metal layer. Different liquids underneath the cavity result in different resonant frequencies and coupling levels of the cavity. Measurements were performed with water-methanol mixtures, resulting in an observed 400 MHz shift of maximum coupling frequencies and 0.8 dB of maximum coupling levels.

Keywords

cavity resonators; ceramic packaging; millimetre wave detectors; organic compounds; LTCC cavity senses technology; cavity bottom metal layer; frequency 400 MHz; frequency 60 GHz; gain 0.8 dB; lab-on-chip microfluidics; liquid sensing substrate integrated cavity resonator; maximum coupling frequency level; resonant frequency; water-methanol mixture; Cavity resonators; Couplings; Frequency measurement; Liquids; Methanol; Sensors; Temperature measurement; cavity resonator; microfluidics; microwave sensors; millimeter wave circuit;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference (EuMC), 2013 European

Conference_Location

Nuremberg

Type

conf

Filename

6686730