Title :
Tunable FBARs based on sol-gel grown PMN-PT films
Author :
Vorobiev, Alexey ; Gevorgian, S. ; Spreitzer, M. ; Veber, A. ; Suvorov, D.
Author_Institution :
Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Gothenburg, Sweden
Abstract :
In this work possibilities of using of sol-gel grown PMN-PT films in tunable film bulk acoustic wave resonators are considered. More than 4% tuning of resonance frequency under DC field less than 15 V/μm is demonstrated. Linear and nonlinear electrostriction and induced piezoelectric coefficients of the PMN-PT films are evaluated.
Keywords :
bulk acoustic wave devices; electrostriction; lead compounds; semiconductor thin films; sol-gel processing; nonlinear electrostriction; piezoelectric coefficients; resonance frequency; sol-gel grown PMN-PT films; tunable FBAR; tunable film bulk acoustic wave resonators; Couplings; Crystals; Electrostriction; Film bulk acoustic resonators; Films; Permittivity measurement; Resonant frequency; PMN-PT films; nonlinear electrostriction coefficient; tunable FBAR;
Conference_Titel :
Microwave Conference (EuMC), 2013 European
Conference_Location :
Nuremberg
