Lateral mode intrinsically switchable barium titanate film bulk acoustic wave resonators

This paper presents the design, simulation results, and measurement results of lateral mode intrinsically switchable bulk acoustic wave resonators based on the ferroelectric material barium titanate. Lateral dimensions of these devices determine their resonance frequencies, significantly simplifying the fabrication of monolithic multi-frequency circuits. By applying a dc bias, the resonance modes can be excited and the resonators are switched on. Resonator designs with parallel plate electrodes and interdigitated electrodes are demonstrated and have resonance frequencies from 160 MHz to 1.67 GHz. When the dc bias is removed, the resonances are switched off and the devices behave as capacitors.