A simple nonlinear mBVD model parameter extraction method for intrinsically switchable ferroelectric FBARs

Author

Seungku Lee ; Lee, Victor ; Sis, Seyit Ahmet ; Mortazawi, Amir

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA

fYear

2013

fDate

6-10 Oct. 2013

Firstpage

1355

Lastpage

1358

Abstract

In this paper, a method for extracting the nonlinear mBVD model parameters for intrinsically switchable ferroelectric thin film bulk acoustic resonators (FBARs) is presented. Ferroelectric FBARs based on BST exhibit an electric field induced piezoelectric effect. This property allows for the design of ferroelectric FBAR based tunable and switchable circuits. Simple yet accurate nonlinear models are essential to accurately predict the nonlinear behavior of such devices. This paper provides the detailed parameter extraction method for BST FBARs. Simulation results for the extracted nonlinear mBVD model for a BST FBAR show very good agreement with measurement results over a wide range of dc bias voltages.

Keywords

acoustic resonators; electric field effects; ferroelectric devices; electric field induced piezoelectric effect; film bulk acoustic resonators; nonlinear mBVD model; parameter extraction method; switchable circuits; switchable ferroelectric FBAR; Film bulk acoustic resonators; Frequency measurement; Impedance; Integrated circuit modeling; Parameter extraction; Resonant frequency; Voltage measurement; electrostriction; ferroelectric devices; nonlinear mBVD model; parameter extraction;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference (EuMC), 2013 European

Conference_Location

Nuremberg

Type

conf

Filename

6686917