• DocumentCode
    65609
  • Title

    Guest Editorial Special Section on the 2012 International Conference on Microelectronic Test Structures

  • Author

    Weiland, Larg H.

  • Author_Institution
    PDF Solutions, Inc., San Jose, CA, USA
  • Volume
    26
  • Issue
    3
  • fYear
    2013
  • fDate
    Aug. 2013
  • Firstpage
    261
  • Lastpage
    261
  • Abstract
    This special section is comprised of six papers which are based on work that was presented at the 2012 International Conference on Microelectronic Test Structures, held in San Diego, CA, USA, March 19-22.
  • Keywords
    Meetings; Microelectronics; Special issues and sections; Test equipment; Testing;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2013.2272482
  • Filename
    6572921