DocumentCode
65609
Title
Guest Editorial Special Section on the 2012 International Conference on Microelectronic Test Structures
Author
Weiland, Larg H.
Author_Institution
PDF Solutions, Inc., San Jose, CA, USA
Volume
26
Issue
3
fYear
2013
fDate
Aug. 2013
Firstpage
261
Lastpage
261
Abstract
This special section is comprised of six papers which are based on work that was presented at the 2012 International Conference on Microelectronic Test Structures, held in San Diego, CA, USA, March 19-22.
Keywords
Meetings; Microelectronics; Special issues and sections; Test equipment; Testing;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2272482
Filename
6572921
Link To Document