Title :
Electrical tuning of dielectric resonators with LIGA-MEMS
Author :
Rusch, Christian ; Borner, Martin ; Mohr, J. ; Zwick, T. ; Yi Chen ; De Los Santos, Hector J.
Author_Institution :
Karlsruhe Inst. of Technol., Karlsruhe, Germany
Abstract :
A novel dielectric resonator (DR) resonant frequency tuning concept implemented, for the first time, in a micro-electro-mechanical-systems (MEMS) “Lithography, Electroplating and Molding” (LIGA) process, is presented. The complete system, except for the DR, is manufactured in the LIGA process. A description of the structure, consisting of a transmission line-DR system, coupled with a metallic Mach-Zenhder-Interferometer (MZI), is given. Simulation results, which show the resonance frequency tuning, the low Q-factor-reduction and first measurements with manufactured samples, as proof of concept, are included.
Keywords :
LIGA; Q-factor; dielectric resonators; micromechanical resonators; LIGA-MEMS; MZI; dielectric resonators; electrical tuning; lithography, electroplating and molding process; low Q-factor-reduction; metallic Mach-Zenhder interferometer; microelectromechanical-systems; resonant frequency tuning concept; transmission line-DR system; Dielectrics; Loading; Micromechanical devices; Microwave circuits; Resonant frequency; Transmission line measurements; Tuning;
Conference_Titel :
Microwave Integrated Circuits Conference (EuMIC), 2013 European
Conference_Location :
Nuremberg
