Electrical tuning of dielectric resonators with LIGA-MEMS

Author

Rusch, Christian ; Borner, Martin ; Mohr, J. ; Zwick, T. ; Yi Chen ; De Los Santos, Hector J.

Author_Institution

Karlsruhe Inst. of Technol., Karlsruhe, Germany

fYear

2013

fDate

6-8 Oct. 2013

Firstpage

316

Lastpage

319

Abstract

A novel dielectric resonator (DR) resonant frequency tuning concept implemented, for the first time, in a micro-electro-mechanical-systems (MEMS) “Lithography, Electroplating and Molding” (LIGA) process, is presented. The complete system, except for the DR, is manufactured in the LIGA process. A description of the structure, consisting of a transmission line-DR system, coupled with a metallic Mach-Zenhder-Interferometer (MZI), is given. Simulation results, which show the resonance frequency tuning, the low Q-factor-reduction and first measurements with manufactured samples, as proof of concept, are included.

Keywords

LIGA; Q-factor; dielectric resonators; micromechanical resonators; LIGA-MEMS; MZI; dielectric resonators; electrical tuning; lithography, electroplating and molding process; low Q-factor-reduction; metallic Mach-Zenhder interferometer; microelectromechanical-systems; resonant frequency tuning concept; transmission line-DR system; Dielectrics; Loading; Micromechanical devices; Microwave circuits; Resonant frequency; Transmission line measurements; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Integrated Circuits Conference (EuMIC), 2013 European

Conference_Location

Nuremberg

Type

conf

Filename

6687849