• DocumentCode
    656849
  • Title

    SH-SAW sensor on langasite for mass detection in liquid media

  • Author

    Baracu, Angela ; Nedelcu, Monica ; Craciunoiu, F. ; Voicu, Ramiro ; Muller, Rudolf

  • Author_Institution
    Nat. Inst. for R&D in Microtechnol. (IMT Bucharest), Bucharest, Romania
  • Volume
    1
  • fYear
    2013
  • fDate
    14-16 Oct. 2013
  • Firstpage
    115
  • Lastpage
    118
  • Abstract
    This paper presents experimental realization of shear horizontal surface acoustic wave (SH-SAW) sensor on Langasite (LGS) for mass detection in liquid media. The presence of mycotoxins in food or pesticides in water supplies can produce grave implications on human health. Sensitive and selective sensors capable of quickly detecting the level of contamination with fungal toxins growing on grains in storage, are needed. Shear horizontal surface acoustic wave (SH-SAW) devices provide an attractive platform for the design of biosensors that operate in liquid media. The paper reports on a SH-SAW delay line designed and fabricated on langasite (LGS), Euler angles (0°, 22°, 90°). The SH-SAW devices have been fabricated using the microfabrication method by lift-off lithography process to define the patterns for the IDT structures. Frequency response of device was monitored using Anritsu vector network analyzer (VNA). A test setup was implemented for the characterization of LGS SH-SAW-based sensors.
  • Keywords
    acoustic delay lines; biosensors; contamination; network analysers; surface acoustic wave sensors; IDT structures; SH SAW sensor; biosensors; contamination level; delay line; frequency response; fungal toxins; human health; langasite; lift off lithography process; liquid media; mass detection; microfabrication method; mycotoxins; selective sensors; sensitive sensors; shear horizontal surface acoustic wave sensor; vector network analyzer; water supplies; Gold; Liquids; Substrates; Surface acoustic wave devices; Surface acoustic waves; Transducers; Langasite; SH-SAW; biosensors; lift-off; piezoelectric substrate;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2013 International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4673-5670-1
  • Electronic_ISBN
    1545-827X
  • Type

    conf

  • DOI
    10.1109/SMICND.2013.6688105
  • Filename
    6688105