DocumentCode
656849
Title
SH-SAW sensor on langasite for mass detection in liquid media
Author
Baracu, Angela ; Nedelcu, Monica ; Craciunoiu, F. ; Voicu, Ramiro ; Muller, Rudolf
Author_Institution
Nat. Inst. for R&D in Microtechnol. (IMT Bucharest), Bucharest, Romania
Volume
1
fYear
2013
fDate
14-16 Oct. 2013
Firstpage
115
Lastpage
118
Abstract
This paper presents experimental realization of shear horizontal surface acoustic wave (SH-SAW) sensor on Langasite (LGS) for mass detection in liquid media. The presence of mycotoxins in food or pesticides in water supplies can produce grave implications on human health. Sensitive and selective sensors capable of quickly detecting the level of contamination with fungal toxins growing on grains in storage, are needed. Shear horizontal surface acoustic wave (SH-SAW) devices provide an attractive platform for the design of biosensors that operate in liquid media. The paper reports on a SH-SAW delay line designed and fabricated on langasite (LGS), Euler angles (0°, 22°, 90°). The SH-SAW devices have been fabricated using the microfabrication method by lift-off lithography process to define the patterns for the IDT structures. Frequency response of device was monitored using Anritsu vector network analyzer (VNA). A test setup was implemented for the characterization of LGS SH-SAW-based sensors.
Keywords
acoustic delay lines; biosensors; contamination; network analysers; surface acoustic wave sensors; IDT structures; SH SAW sensor; biosensors; contamination level; delay line; frequency response; fungal toxins; human health; langasite; lift off lithography process; liquid media; mass detection; microfabrication method; mycotoxins; selective sensors; sensitive sensors; shear horizontal surface acoustic wave sensor; vector network analyzer; water supplies; Gold; Liquids; Substrates; Surface acoustic wave devices; Surface acoustic waves; Transducers; Langasite; SH-SAW; biosensors; lift-off; piezoelectric substrate;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2013 International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4673-5670-1
Electronic_ISBN
1545-827X
Type
conf
DOI
10.1109/SMICND.2013.6688105
Filename
6688105
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