Title :
Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket´s clavate hair
Author :
Droogendijk, H. ; de Boer, M.J. ; Sanders, R.G.P. ; Krijnen, G.J.M.
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
Abstract :
Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. First measurements indicate that this MEMS hair-based accelerometer has a resonance frequency of 367 Hz, a detection threshold of 0.63 m/s2 and is able to measure accelerations up to 1 g.
Keywords :
acceleration measurement; accelerometers; biomimetics; lithography; micromachining; microsensors; MEMS hair-based accelerometer; SU-8 lithography; acceleration measurement; acceleration sensor; biomimetic accelerometer; clavate hair system; cricket; frequency 367 Hz; surface micromachining; Acceleration; Accelerometers; Frequency measurement; Hair; Micromechanical devices; Noise; Sensors;
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
DOI :
10.1109/ICSENS.2013.6688165
