A micromachined vibrating wheel gyroscope with folded beams

This paper presents a micromachined vibrating wheel gyroscope with folded driving beams, which can improve the linearity and temperature stability of the gyroscope. The angular comb drives on the outer frame are used for large driving displacement, while the gap-changing comb capacitors on the inner frame are used for sensing the displacement with high sensitivity. The experimental results show that the scale factor and nonlinearity are 4.2 mV/°/s and 0.08% with the measurement range of ±500 °/s. The short term bias instability is evaluated to be about 34.1 °/h.