Title :
A tunable high performance microwave equalizer based on RF MEMS switches
Author :
Lei Han ; Wen Jiang ; Yan-qing Zhu ; Ming-xia Jiang
Author_Institution :
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
The theory, design, fabrication and measurements of a novel tunable equalizer for adjusting the microwave signals based on RF MEMS switches are presented. The novelty of the tunable equalizer is the RF MEMS switches and the thick CPW line with released signal and ground sections based on the MEMS technology. This equalizer adjusts the attenuation curve by the RF MEMS switches and makes the power of the microwave signal flat during the work frequency range. In this method, the equalizer can achieve tunable characteristic, high frequency and good microwave performance. This MEMS equalizer is fabricated by MetalMUMPs process. The experiment results show the MEMS equalizer can adjust two attenuation curves and has low reflection losses, low minimal insertion losses at frequency range from 20GHz~24GHz.
Keywords :
coplanar waveguides; equalisers; losses; microfabrication; microswitches; microwave integrated circuits; microwave measurement; microwave propagation; MEMS technology; MetalMUMPs process; RF MEMS switches; attenuation curve adjustment; frequency 20 GHz to 24 GHz; insertion loss; microwave measurements; microwave performance; microwave signal adjustment; reflection loss; thick CPW line; tunable characteristic; tunable high performance microwave equalizer design; tunable high performance microwave equalizer fabrication; Attenuation; Coplanar waveguides; Equalizers; Insertion loss; Microswitches; Microwave circuits; Radio frequency;
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
DOI :
10.1109/ICSENS.2013.6688243
