DocumentCode :
656998
Title :
Cavity-enhanced mid-infrared on-chip chemical sensing using high-Q chalcogenide glass resonators
Author :
Hongtao Lin ; Chillakuru, Yeshwant ; McLaughlin, Keiran ; Lan Li ; Yi Zou ; Fei Deng ; Chaoying Ni ; Danto, Sylvain ; Musgraves, J. David ; Richardson, Kathleen ; Juejun Hu
Author_Institution :
Dept. of Mater. Sci. & Eng., Univ. of Delaware, Newark, DE, USA
fYear :
2013
fDate :
3-6 Nov. 2013
Firstpage :
1
Lastpage :
4
Abstract :
We experimentally demonstrated for the first time on-chip cavity-enhanced mid-infrared spectroscopic sensing of chemical molecules, performed near 5.2 μm wavelength using Ge23Sb7S70 resonators monolithically fabricated on CaF2 substrates.
Keywords :
antimony compounds; cavity resonators; chalcogenide glasses; chemical sensors; germanium compounds; infrared detectors; infrared spectroscopy; micromechanical resonators; microsensors; CaF2; CaF2 substrates; Ge23Sb7S70; chemical molecules; high-Q chalcogenide glass resonators; on-chip cavity-enhanced midinfrared spectroscopic sensing; Glass; Optical device fabrication; Optical resonators; Optical sensors; Optical waveguides; Mid-IR; Resonator; Spectroscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
ISSN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2013.6688278
Filename :
6688278
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=656998
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