Title :
Novolac-modified self-sensing piezoelectric microcantilever gas sensor
Author :
Khabiry, Masoud ; Jalili, Nader ; Sirdhar, Srinivas
Author_Institution :
Piezoactive Syst. Lab., Northeastern Univ., Boston, MA, USA
Abstract :
Development of micro- and nano- electromechanical systems (MEMS and NEMS) contributed significantly to invention of very sensitive methodologies for detection of ultrasmall masses. In this work, a novel Novolac coated piezoelectric self-sensing microcantilever system for detection of ethanol vapor was employed. By exposing two differently polymer coated microcantilevers to the ethanol vapor a downward shift of resonance frequency (33 and 28.95 kHz) was observed. The developed self-sensing strategy proved to provide a simple, inexpensive, and yet highly sensitive platform to detect chemical vapors.
Keywords :
cantilevers; gas sensors; microsensors; piezoelectric transducers; MEMS; NEMS; Novolac coated piezoelectric system; ethanol vapor detection; frequency 28.95 kHz; frequency 33 kHz; microelectromechanical system; nanoelectromechanical system; piezoelectric microcantilever gas sensor; polymer coated microcantilever; resonance frequency; self-sensing microcantilever system; Chemicals; Ethanol; Frequency measurement; Polymers; Resonant frequency; Sensors; Vibrometers;
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
DOI :
10.1109/ICSENS.2013.6688373
