DocumentCode :
657152
Title :
Structural reliability and thermal insulation performance of flexible thermoelectric generator for wearable sensors
Author :
Francioso, Luca ; De Pascali, Chiara ; Siciliano, Pietro ; Bartali, R. ; Morganti, E. ; Lorenzelli, Leandro ; de Risi, Arturo
Author_Institution :
Inst. for Microelectron. & Microsyst., Lecce, Italy
fYear :
2013
fDate :
3-6 Nov. 2013
Firstpage :
1
Lastpage :
4
Abstract :
Present work highlights the progress in the field of polymeric package reliability engineering for a flexible thermoelectric generator realized by thin film semiconductor technology on Kapton®. Together with mechanical enhancement, the thermal insulation performance of the realized 3D custom package was tested. The effect of different plasma treatments on the mechanical performance and interface of a Polydimethylsiloxane (PDMS)/Kapton® assembly were investigated; in order to increase the package mechanical stability of the realized wearable power source, Kapton® surface wettability was investigated by static contact angle measurements using deionized water and PDMS as liquid test. In fact, well known weak adhesion between PDMS and Kapton® leads to delamination of the package with unrecoverable damage of the generator. Plasma effect on adhesion performances was evaluated by scratch test method. By a numerical thermal analysis, the device packaging was optimized by coupling the module realized onto Kapton foil (by thin film PVD technology) to a PDMS layer opportunely molded to thermally insulate TEG cold junctions and enhance the thermal gradient useful for thermocouples operation. Fabrication process with optical lithography steps allows high resolution definition of thermoelectric semiconductors alloys. The main advances in wearable generator packaging technology is represented by increased structural robustness of PDMS/Kapton® assembly in terms of delamination and fatigue resistance.
Keywords :
contact angle; electric sensing devices; mechanical stability; photolithography; reliability; semiconductor device packaging; semiconductor thin films; thermal analysis; thermal insulation; thermocouples; thermoelectric conversion; 3D custom package; Kapton foil; Kapton surface wettability; PDMS layer; PDMS-Kapton assembly; adhesion performance; fabrication process; flexible thermoelectric generator; numerical thermal analysis; optical lithography; package mechanical stability; plasma effect; plasma treatment; polydimethylsiloxane; polymeric package reliability engineering; scratch test method; static contact angle measurement; structural reliability; thermal gradient; thermal insulation performance; thermally insulate TEG cold junctions; thermocouple operation; thermoelectric semiconductor alloy; thin film semiconductor technology; wearable generator packaging technology; wearable power source; wearable sensor; Adhesives; Dispersion; Liquids; Plasma measurements; Plasmas; Substrates; Surface treatment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
ISSN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2013.6688438
Filename :
6688438
Link To Document :
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