DocumentCode :
657161
Title :
Ultrananocrystalline diamond: New opportunities for the fabrication of novel sensors
Author :
Sumant, Anirudha V.
Author_Institution :
Center for Nanoscale Mater., Argonne Nat. Lab., Argonne, IL, USA
fYear :
2013
fDate :
3-6 Nov. 2013
Firstpage :
1
Lastpage :
1
Abstract :
The ultrananocrystallne diamond (UNCD) thin films are generally characterized by their small grain size (2-5 nm) with about 98% of the carbon atoms present in the sp3 bonded configuration and rest of the carbon atoms residing at the atomically abrupt grain boundaries mostly in mixed sp3 and sp2 configuration. Previous studies carried out by our group have shown that the UNCD thin film has excellent chemical, mechanical, and electrical properties. The electrical conductivity of the UNCD thin films can be altered significantly by introducing impurities (such as nitrogen or boron) during the growth. Our recent work has demonstrated that the UNCD thin films can be carved into quasi-1 dimensional nanowires using a top-down nano fabrication process. I will discuss how the impurity presence (nitrogen or boron) and its location (within grain or grain boundary) can significantly affect the resistance of UNCD nanowires as a function of gas adsorption and pressure. This effect could be exploited further for developing extremely sensitive gas and pressure/displacement sensors. We believe that these results will open-up new opportunities and possibilities for the fabrication of novel UNCD-based sensors with increased sensitivity and new functionalities for a variety of applications.
Keywords :
adsorption; boron; diamond; displacement measurement; electrical conductivity; gas sensors; grain boundaries; nanofabrication; nanosensors; nanowires; nitrogen; pressure sensors; C:B; C:N; UNCD nanowire resistance; displacement sensor; electrical conductivity; gas adsorption; gas sensor; impurity presence; pressure sensor; quasione dimensional nanowire; sensor fabrication; top-down nanofabrication process; ultrananocrystalline diamond; Diamond-like carbon; Diamonds; Fabrication; Nanoscale devices; Nanowires; Sensors; Ultrananocrystalline diamond; nanowire;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
SENSORS, 2013 IEEE
Conference_Location :
Baltimore, MD
ISSN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2013.6688447
Filename :
6688447
Link To Document :
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