DocumentCode :
65920
Title :
Electrode-Gap Effects on the Electron Density and Electron Temperature in Atmospheric Radio-Frequency Discharges
Author :
Zhang, Y.T. ; Jie Lou ; Qingquan Li ; Qingmin Li
Author_Institution :
UHV Technol. & Gas Discharge Phys., Shandong Univ., Jinan, China
Volume :
41
Issue :
3
fYear :
2013
fDate :
Mar-13
Firstpage :
414
Lastpage :
420
Abstract :
The electrode-gap effects on discharge characteristics have attracted increasing attention in the design of atmospheric discharge devices. In this paper, a 1-D fluid model is used to explore the influences of electrode gap on the electron density and temperature of atmospheric radio-frequency discharges under a constant power density condition. As the electrode gap is increased, both the applied voltage and current density increase and the computational data and analytical equations show a monotonic increase in the electron density; the peak electron temperature in the sheath increases but decreases in the bulk plasma region. At a constant power density, altering the electrode gap can be used to tailor the spatial distribution of the electron density and electrode temperature.
Keywords :
current density; electrodes; high-frequency discharges; plasma density; plasma devices; plasma sheaths; plasma temperature; plasma transport processes; 1D fluid model; analytical equations; applied voltage; atmospheric radiofrequency discharge devices; bulk plasma region; constant power density condition; current density; electrode-gap effects; electron density; electron temperature; spatial distribution; Density measurement; Discharges (electric); Electrodes; Plasma temperature; Power system measurements; Radio frequency; Atmospheric radio-frequency (rf) discharges; electron density; electron temperature; plasma simulation;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2013.2244912
Filename :
6468115
Link To Document :
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