Title :
A new comb slow wave CPW for on chip area reduction and its RLCG model
Author :
Bjorndal, Oystein ; Kjelgard, Kristian Gjertsen
Author_Institution :
Dept. of Inf., Univ. of Oslo, Oslo, Norway
Abstract :
A compact low impedance transmission line in 90 nm CMOS is presented. The new comb slow wave grounded coplanar waveguide (comb-S-GCPW) is modeled, simulated and fabricated. Model is a simple and analytic RLCG equivalent circuit. The model agrees well with simulation and measurements in 90 nm CMOS. Measurements show a relative dielectric constant of 141 for a 12.3 Ω comb slow wave line, compared to 44.7 at 23.6 Ω without fingers.
Keywords :
CMOS integrated circuits; circuit simulation; coplanar transmission lines; coplanar waveguides; equivalent circuits; integrated circuit modelling; permittivity; slow wave structures; CMOS integrated circuits; RLCG equivalent circuit; RLCG model; chip area reduction; comb slow wave CPW; comb slow wave grounded coplanar waveguide; comb slow wave line; compact low impedance transmission line; dielectric constant; resistance 12.3 ohm; resistance 23.6 ohm; size 90 nm; CMOS integrated circuits; Capacitance; Coplanar waveguides; Impedance; Power transmission lines; Semiconductor device modeling; Transmission line measurements; CMOS integrated circuits; Integrated circuit interconnections; Millimeter wave integrated circuits; Transmission lines;
Conference_Titel :
Microwave Conference Proceedings (APMC), 2013 Asia-Pacific
Conference_Location :
Seoul
DOI :
10.1109/APMC.2013.6695161
