• DocumentCode
    663032
  • Title

    Modular assembly of flexible thin-film electrode arrays enabled by a laser-structured ceramic adapter

  • Author

    Fiedler, E. ; Ordonez, Juan ; Stieglitz, T.

  • Author_Institution
    Dept. of Microsyst. Eng.-IMTEK, Univ. of Freiburg, Freiburg, Germany
  • fYear
    2013
  • fDate
    6-8 Nov. 2013
  • Firstpage
    657
  • Lastpage
    660
  • Abstract
    The assembly of flexible polyimide-based thin-film electrode arrays with commercial Nano Omnetics connectors turned out to be a sensitive and very time-consuming fabrication step in the past, especially when high integration densities of connector pads had to be addressed. We developed a laser-structured ceramic adapter, which simplifies this assembly and which allows a robust and reliable connection between the connectors and the thin-film electrode arrays. Furthermore, the adapter facilitates the handling of the flexible devices and offers the possibility of a modular system design and assembly of the polyimide-based thin-film electrode arrays. An ECoG-array with 252 recording electrode sites has been chosen as first design example in this study. The system was sub-divided in six single arms, whose cables were stacked on each other. Thereby, the cable width of the whole device could be reduced dramatically to 1.35 mm. The modular assembly also increases the fabrication yield due to a separation of MEMS processing and assembly. In case of failure occurrence during the MEMS processing (e.g. shortcut or open connection) only a single subsystem of the ECoG array is affected, which can easily be replaced by another one. The possibility of subsystem replacement also opens up a simple and fast way to implement design variations.
  • Keywords
    bioMEMS; biomedical electrodes; biomedical electronics; ceramics; electroencephalography; flexible electronics; laser materials processing; microelectrodes; neurophysiology; polymer films; self-assembly; thin film devices; thin films; ECoG-array; MEMS assembly; MEMS processing; cable width; commercial Nano Omnetics connectors; connector pads; design variations; electrode site recording; failure occurrence; flexible devices; flexible polyimide-based thin-film electrode arrays; high integration densities; laser-structured ceramic adapter; modular assembly; modular system design; Assembly; Ceramics; Electrodes; Lasers; Pins; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Neural Engineering (NER), 2013 6th International IEEE/EMBS Conference on
  • Conference_Location
    San Diego, CA
  • ISSN
    1948-3546
  • Type

    conf

  • DOI
    10.1109/NER.2013.6696020
  • Filename
    6696020