Title :
15-GHz flexible microwave thin-film transistors on plastic
Author :
Jung-Hun Seo ; Han Zhou ; Paskiewicz, D.M. ; Lagally, M.G. ; Weidong Zhou ; Zhenqiang Ma
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA
Abstract :
We demonstrate microwave flexible thin-film transistors (TFTs) using transferrable single crystalline Si nanomembranes (NMs). By combining self-sustained strain techniques and strain compatible doping techniques, we realize a new speed record, fmax of 15 GHz, for flexible microwave TFTs based on Si. The TFTs exhibit superior mechanical flexibility. The demonstrations showed the great potential to further develop flexible microwave components and systems.
Keywords :
elemental semiconductors; flexible electronics; plastics; semiconductor doping; silicon; thin film transistors; NM; Si; TFT; flexible microwave components; frequency 15 GHz; mechanical flexibility; plastic; self-sustained strain techniques; strain compatible doping techniques; thin-film transistors; transferrable single crystalline nanomembranes; Microwave communication; Microwave transistors; Silicon; Silicon germanium; Strain; Thin film transistors; Doping; Microwave flexible electronics; Si nanomembrane; Strain; Thin-film transistors;
Conference_Titel :
Microwave Symposium Digest (IMS), 2013 IEEE MTT-S International
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4673-6177-4
DOI :
10.1109/MWSYM.2013.6697709
