15-GHz flexible microwave thin-film transistors on plastic

Author

Jung-Hun Seo ; Han Zhou ; Paskiewicz, D.M. ; Lagally, M.G. ; Weidong Zhou ; Zhenqiang Ma

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Wisconsin-Madison, Madison, WI, USA

fYear

2013

fDate

2-7 June 2013

Firstpage

1

Lastpage

4

Abstract

We demonstrate microwave flexible thin-film transistors (TFTs) using transferrable single crystalline Si nanomembranes (NMs). By combining self-sustained strain techniques and strain compatible doping techniques, we realize a new speed record, f_max of 15 GHz, for flexible microwave TFTs based on Si. The TFTs exhibit superior mechanical flexibility. The demonstrations showed the great potential to further develop flexible microwave components and systems.

Keywords

elemental semiconductors; flexible electronics; plastics; semiconductor doping; silicon; thin film transistors; NM; Si; TFT; flexible microwave components; frequency 15 GHz; mechanical flexibility; plastic; self-sustained strain techniques; strain compatible doping techniques; thin-film transistors; transferrable single crystalline nanomembranes; Microwave communication; Microwave transistors; Silicon; Silicon germanium; Strain; Thin film transistors; Doping; Microwave flexible electronics; Si nanomembrane; Strain; Thin-film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (IMS), 2013 IEEE MTT-S International

Conference_Location

Seattle, WA

ISSN

0149-645X

Print_ISBN

978-1-4673-6177-4

Type

conf

DOI

10.1109/MWSYM.2013.6697709

Filename

6697709