Low-loss low-dispersive high-resistivity silicon dielectric slab waveguide for THz region

In this paper, the performance of dielectric slab waveguides in the Terahertz (THz) frequency band is studied. High-Resistivity silicon (HR-silicon) is selected as the host material due to its high transparency in THz region. The low-cost fabrication process of the waveguide is described. Finite Element Method (FEM) based simulator (HFSS) and THz Time Domain Spectroscopy (THz-TDS) system were employed to characterize the waveguide both theoretically and experimentally. It is shown that the proposed transmission line is low-loss and low-dispersive for a wide bandwidth.