Impact of chemical mechanical polishing on the quality factor of Ba0.5Sr0.5TiO3 solidly mounted resonator

Author

Saddik, George N. ; York, R.A.

Author_Institution

Electr. & Comput. Eng. Dept., Univ. of California Santa Barbara, Santa Barbara, CA, USA

fYear

2013

fDate

2-7 June 2013

Firstpage

1

Lastpage

4

Abstract

A voltage activated barium strontium titanate solidly mounted resonator was fabricated and measured. The barium strontium titanate was deposited on a chemical mechanical polished acoustic Bragg reflector with a surface roughness of 0.504nm RMS. Data was collected on the device at a dc bias voltage range of 0V to 25V in 5V increments. The barium strontium titanate solidly mounted resonator showed an effective quality factor of 100 to 180 over the bias range.

Keywords

barium compounds; bulk acoustic wave devices; chemical mechanical polishing; strontium compounds; surface roughness; titanium compounds; Ba_0.5Sr_0.5TiO₃; RMS; acoustic Bragg reflector; bulk acoustic wave device; chemical mechanical polishing; dc bias voltage; quality factor; surface roughness; voltage 0 V to 25 V; voltage activated barium strontium titanate solidly mounted resonator; Acoustics; Chemicals; Q-factor; Rough surfaces; Surface impedance; Surface roughness; Surface treatment; Acoustic devices; barium compounds; bulk acoustic wave devices; ferroelectric films; piezoelectric devices; voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (IMS), 2013 IEEE MTT-S International

Conference_Location

Seattle, WA

ISSN

0149-645X

Print_ISBN

978-1-4673-6177-4

Type

conf

DOI

10.1109/MWSYM.2013.6697726

Filename

6697726