DocumentCode
665364
Title
Copper pillar shape and related stress simulation studies in flip chip packages
Author
Ying-Chih Lee ; Factor, Bradford ; Chin-Li Kao ; Yannou, Jean-Marc ; Chang-Chi Lee
Author_Institution
ASE Kaohsiung, ASE Group, Kaohsiung, Taiwan
fYear
2013
fDate
9-12 Sept. 2013
Firstpage
1
Lastpage
5
Abstract
One of the major benefits of copper pillar interconnect is to reduce the pillar footprint in comparison to that for traditional solder bumps. This increases the space available for escape routing between neighboring pillars as compared to traditional solder bumps and, in many cases, permits the reduction of the number of substrate layers and, in turn, reduces the cost of the flip chip package solution. In this paper, we have used finite element analysis to simulate thermo-mechanical stresses in oblong-shaped copper pillars, a configuration which further increases the space available for escape routing. We pay particular attention to the maximum tensile stress at the surface of the dielectric layers on the chip and the solder. We compare three different types of copper pillar cross section geometries: circular, oblong-shape in the radial direction and oblong-shape in the anti-radial direction as well as diameters of polyimide passivation opening under the copper pillar. We find the lowest stress is obtained by using oblong shaped copper pillars in the radial direction in conjunction with a small opening of the polyimide passivation.
Keywords
copper; flip-chip devices; integrated circuit packaging; passivation; polymers; copper pillar shape; flip chip packages; polyimide passivation; stress simulation; substrate layers; Copper; Creep; Flip-chip devices; Routing; Strain; Stress; Substrates; copper pillar bumps; flip chip; low-k layers; oblong-shaped pillars; stress modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics Packaging Conference (EMPC) , 2013 European
Conference_Location
Grenoble
Type
conf
Filename
6698689
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