Title :
Model predictive control of MEMS LCR
Author :
Singh, Ashutosh ; Izadian, Afshin ; Anwar, Sohel
Author_Institution :
Energy Syst. & Power Electron. Lab., IUPUI, Indianapolis, IN, USA
Abstract :
This paper illustrates the application of model predictive control for trajectory control of micro electro mechanical lateral comb resonators (MEMS LCRs). A recursive least square estimator with dynamic data weighting method is used to estimate the parameters of MEMS in real-time. Accordingly, the control law and the gains are derived to achieve high performance trajectory control. Simulation results demonstrate a close trajectory profile tracking and accurate parameter estimation performance.
Keywords :
least mean squares methods; machine control; micromechanical resonators; predictive control; trajectory control; MEMS LCR; dynamic data weighting method; high performance trajectory control; microelectromechanical lateral comb resonator; model predictive control; parameter estimation; recursive least square estimator; trajectory profile tracking; Estimation; Mathematical model; Micromechanical devices; Parameter estimation; Predictive control; Trajectory; Transfer functions;
Conference_Titel :
Industrial Electronics Society, IECON 2013 - 39th Annual Conference of the IEEE
Conference_Location :
Vienna
DOI :
10.1109/IECON.2013.6699707
