Frequency separation self resonance cancellation for vibration suppression control of a large-scale stage using multiple position sensors

High-precision stages are industrial equipment for micro-fabrications. Fast and precise positioning control is very important technology related to the improvement of the throughput and the product quality. Especially, a large-scale stage has a low resonance mode which disturbs fast and precise positioning because of the structures of the stage. In this paper, a novel feedback system is proposed in a SIMO system using multiple position sensors which are located at an actuator side and a load side. The proposed feedback system has two remarkable features. One is that the effect of the vibration suppression and the phase stabilization of the resonance mode can be tuned simultaneously only by two parameters. The other is that the tuning of the resonance mode does not affect the rigid mode at all. Finally, simulations and experiments with a XY -gantry-stage are performed to show the advantages of the proposed feedback control system.