DocumentCode
667698
Title
Investigation of the electrode coating influence on the frequency temperature characteristics of the resonators operating at the rotated Y-cut Ca3 TaGa3 Si2 O14 single crystals
Author
Medvedev, Alexander ; Zabelin, Alexey ; Bazalevskaya, S. ; Buzanov, O. ; Sakharov, S. ; Alenkov, Vladimir ; Dmitrienko, A. ; Blinov, Andrei
Author_Institution
OAO Fomos - Mater., Moscow, Russia
fYear
2013
fDate
21-25 July 2013
Firstpage
114
Lastpage
117
Abstract
Resonators manufactured on Ca3TaGa3Si2O14 single crystals (CTGS) operating in a thickness shear mode were investigated. The frequency temperature characteristics of the rotated Y-cut based resonators were measured. The resonators operated at the crystal elements with angle cut -21°20´ have frequency deviation less than 120 ppm in the operating temperature range from -60 up to 85°C. The temperature coefficient of frequency of the second order is close to -0.022 ppm/°C2. It is shown that maintaining turnover point of the frequency temperature characteristic within the range of ±1 °C requires accuracy of the crystal element manufacturing not worse than ±1.5 angular minutes for resonators with Ag electrodes. The dependence of the Bechmann´s number on electrode thickness was calculated. It was discovered that for Ag electrode coating with electrode thickness of 200 nm, the single-response characteristic of the resonator can be obtained if the electrode size (lx) does not exceed 12 thicknesses of the crystal element. With the limiting value of the relative electrode size equaling lx/t =12.3, the relative resonance interval is 1%, while the capacitance ratio is 47 units.
Keywords
calcium compounds; crystal resonators; electrodes; gallium compounds; silver; tantalum compounds; Ag; Bechmann number; Ca3TaGa3Si2O14; crystal element manufacturing; crystal resonators operating; electrode coating; frequency temperature characteristics; rotated Y-cut single crystals; size 200 nm; temperature -60 degC to 85 degC; thickness shear mode; Crystals; Electrodes; Resonant frequency; Temperature distribution; Temperature measurement; Ca3TaGa3Si2O14; bulk acoustic waves; resonator; single crystal; temperature coefficient of frequency (TCF);
fLanguage
English
Publisher
ieee
Conference_Titel
European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013 Joint
Conference_Location
Prague
Type
conf
DOI
10.1109/EFTF-IFC.2013.6702054
Filename
6702054
Link To Document