• DocumentCode
    667698
  • Title

    Investigation of the electrode coating influence on the frequency temperature characteristics of the resonators operating at the rotated Y-cut Ca3TaGa3Si2O14 single crystals

  • Author

    Medvedev, Alexander ; Zabelin, Alexey ; Bazalevskaya, S. ; Buzanov, O. ; Sakharov, S. ; Alenkov, Vladimir ; Dmitrienko, A. ; Blinov, Andrei

  • Author_Institution
    OAO Fomos - Mater., Moscow, Russia
  • fYear
    2013
  • fDate
    21-25 July 2013
  • Firstpage
    114
  • Lastpage
    117
  • Abstract
    Resonators manufactured on Ca3TaGa3Si2O14 single crystals (CTGS) operating in a thickness shear mode were investigated. The frequency temperature characteristics of the rotated Y-cut based resonators were measured. The resonators operated at the crystal elements with angle cut -21°20´ have frequency deviation less than 120 ppm in the operating temperature range from -60 up to 85°C. The temperature coefficient of frequency of the second order is close to -0.022 ppm/°C2. It is shown that maintaining turnover point of the frequency temperature characteristic within the range of ±1 °C requires accuracy of the crystal element manufacturing not worse than ±1.5 angular minutes for resonators with Ag electrodes. The dependence of the Bechmann´s number on electrode thickness was calculated. It was discovered that for Ag electrode coating with electrode thickness of 200 nm, the single-response characteristic of the resonator can be obtained if the electrode size (lx) does not exceed 12 thicknesses of the crystal element. With the limiting value of the relative electrode size equaling lx/t =12.3, the relative resonance interval is 1%, while the capacitance ratio is 47 units.
  • Keywords
    calcium compounds; crystal resonators; electrodes; gallium compounds; silver; tantalum compounds; Ag; Bechmann number; Ca3TaGa3Si2O14; crystal element manufacturing; crystal resonators operating; electrode coating; frequency temperature characteristics; rotated Y-cut single crystals; size 200 nm; temperature -60 degC to 85 degC; thickness shear mode; Crystals; Electrodes; Resonant frequency; Temperature distribution; Temperature measurement; Ca3TaGa3Si2O14; bulk acoustic waves; resonator; single crystal; temperature coefficient of frequency (TCF);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013 Joint
  • Conference_Location
    Prague
  • Type

    conf

  • DOI
    10.1109/EFTF-IFC.2013.6702054
  • Filename
    6702054