DocumentCode :
670444
Title :
A current assisted deposition method based on contact mode atomic force microscope
Author :
Zeng-Lei Liu ; Nian-Dong Jiao ; Lian-Qing Liu ; Zhi-Dong Wang
Author_Institution :
State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
fYear :
2013
fDate :
26-29 May 2013
Firstpage :
287
Lastpage :
290
Abstract :
This paper introduces a novel AFM deposition method. In contrast to traditional method, the method in this paper has two differences. Firstly in our method AFM works in contact mode. AFM tip presses on substrate slightly in contact mode and it does not need to control AFM tip-substrate separation precisely, which makes AFM deposition easy to carry out. Secondly current is applied to AFM tip to induce deposition instead of voltage. By applying current, uniform nanodots can be fabricated repeatedly. Furthermore, nanolines can be fabricated directly in a single action with the method. The method is potential to be used for soldering nanowires or fabricating nanostructures.
Keywords :
atomic force microscopy; nanofabrication; nanowires; AFM; assisted deposition method; contact mode atomic force microscopy; nanostructures; nanowires; soldering; tip-substrate separation; Atomic force microscopy; Electric fields; Force; Gold; Presses; Substrates; AFM; deposition; field emission; nano fabrication;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Cyber Technology in Automation, Control and Intelligent Systems (CYBER), 2013 IEEE 3rd Annual International Conference on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4799-0610-9
Type :
conf
DOI :
10.1109/CYBER.2013.6705460
Filename :
6705460
Link To Document :
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