Title :
Analysis on electrical and optical properties of nitrogen incorporated amorphous carbon prepared by aerosol-assisted CVD method
Author :
Fadzilah, A.N. ; Dayana, K. ; Ismail, L.N. ; Rusop, M.
Author_Institution :
Nano-Electron. Centre (NET), Univ. Teknol. Mara (UiTM), Shah Alam, Malaysia
Abstract :
We have successfully deposit the a-C and nitrogen doped a-C (a-C:N) using the custom-made Aerosol-assisted CVD (AACVD). Natural precursor, camphor oil (C10H16O) was selected as the carbon source. The electrical and optical properties were characterized by BUKOH KEIKI CEP2000 solar simulator system and Perkin Elmer LAMBDA 750 UV-vis-NIR spectroscope respectively. Five samples were prepared for the a-C and a-C: N respectively, with the deposition temperatures ranging from 400°C to 600°C. An ohmic contact was acquired between the carbon/metal configurations from the current-voltage solar simulator system. Higher conductivity at a-C: N, ~x10-2 Scm-1 is due to the decrease in defects since the spin density gap decrease with the nitrogen addition. Pure a-C exhibit absorption coefficient, a of 10 cm-1, whereas for a-C:N, a is of 10 cm-1. The high σ value is at a-C:N is due to the presence of more graphitic component (sp2 carbon bonding) in the carbon films.
Keywords :
absorption coefficients; amorphous state; carbon; chemical vapour deposition; electrical conductivity; nitrogen; ohmic contacts; thin films; ultraviolet spectra; visible spectra; BUKOH KEIKI CEP2000 solar simulator system; C; C:N; Perkin Elmer LAMBDA 750 UV-vis-NIR spectroscope; absorption coefficient; aerosol-assisted CVD method; camphor oil; carbon films; carbon source; carbon-metal configurations; conductivity; current-voltage solar simulator system; deposition temperatures; electrical properties; graphitic component; natural precursor; nitrogen addition; nitrogen doped amorphous carbon; nitrogen incorporated amorphous carbon; ohmic contact; optical properties; pure amorphous carbon; spin density gap; temperature 400 degC to 600 degC; Bonding; Carbon; Conductivity; Nitrogen; Optical films; Aerosol-assisted CVD; Electrical properties; Nitrogen; Optical properties;
Conference_Titel :
Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on
Conference_Location :
Langkawi
Print_ISBN :
978-1-4799-1181-3
DOI :
10.1109/RSM.2013.6706505