Title :
Extremely stable and harsh-environment devices by Transfer Mold field emitter fabrication method
Author :
Nakamoto, Masakazu ; Moon, Jinyeong
Author_Institution :
Grad. Sch. of Eng., Shizuoka Univ., Hamamatsu, Japan
Abstract :
Extremely stable and harsh-environment devices have been fabricated by Transfer Mold emitter fabrication method and by using amorphous carbon (a-C) as an emitter material to realize the vacuum nanoelectronic devices such as electric propulsion engines, power switching devices and field emission displays (FEDs) in harsh environments, for example, in strong radical atmospheres of space, in high and low temperature atmospheres, and in oxidation gas atmospheres during FEDs fabrication process. Transfer Mold a-C FEAs exhibit the most stable field emission characteristics having the emission fluctuation ratio of ±1.62%, which is the lowest values ever reported. Panel and pixel electric thrusters by using Transfer Mold FEAs have been proposed. These electric thrusters make it easy to produce large and small thrusters. The Transfer Mold a-C FEAs exhibit very stable field-emission characteristics and the highest resistance to harsh environments. Therefore, they can be used to make highly efficient and reliable vacuum electronic devices such as electric propulsion engines and FEDs that are manufactured by using various reactive gases and highly oxidizing atmospheres.
Keywords :
amorphous state; electric propulsion; field emission displays; field emitter arrays; oxidation; transfer moulding; Harsh-Environment Devices; amorphous carbon; electric propulsion engines; emission fluctuation; field emission displays; oxidation gas atmospheres; panel electric thrusters; pixel electric thrusters; power switching devices; transfer mold field emitter fabrication method; vacuum nanoelectronic devices; Atomic measurements; Fabrication; Hafnium; Image resolution; Nickel;
Conference_Titel :
Nanotechnology Materials and Devices Conference (NMDC), 2013 IEEE 8th
Conference_Location :
Tainan
Print_ISBN :
978-1-4799-3386-0
DOI :
10.1109/NMDC.2013.6707466