Title :
Design of MEMS cylindrical gyroscope integrated with piezoelectric thin film
Author :
Fujiwara, Koji ; Hida, Hirotaka ; Kanno, Issei
Author_Institution :
Dept. of Mech. Eng., Kobe Univ., Kobe, Japan
Abstract :
In this study, we proposed a new Si-based cylindrical MEMS (microelectromechanical system) gyroscope integrated with piezoelectric thin-film for sensing/driving elements. The cylindrical-resonator based gyroscope has several advantages by using the symmetrical structure; (1) sensitivity can be improved due to high Q-factor by fixing at a vibration node easily. (2) An initial bias signal can be reduced by setting the sensing elements at the vibration nodes. To further improve the sensitivity the proposed gyroscope, we evaluated the efficiency of the thickness ratio between a disk and a cylinder sidewall by using FEM (finite element method) analysis. Also, we numerically confirmed that the sensitivity of the cylindrical gyroscope can be improved by forming the holes on the disk. These simulation results might contribute to design guide for developing a novel MEMS cylindrical gyroscope.
Keywords :
Q-factor; elemental semiconductors; finite element analysis; gyroscopes; micromechanical resonators; piezoelectric thin films; silicon; vibrations; FEM analysis; MEMS cylindrical gyroscope design; Q-factor; cylinder sidewall; cylindrical-resonator-based gyroscope; disk; finite element method; initial bias signal reduction; microelectromechanical system; piezoelectric thin film; sensing-driving elements; sensitivity improvement; silicon-based cylindrical MEMS gyroscope; symmetrical structure; thickness ratio efficiency; vibration node; Finite element analysis; Force; Gyroscopes; Micromechanical devices; Sensitivity; Sensors; Vibrations;
Conference_Titel :
Micro-NanoMechatronics and Human Science (MHS), 2013 International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4799-1527-9
DOI :
10.1109/MHS.2013.6710466
