Title :
Wavelength tuning and controlled temperature dependence of MEMS VCSELs with thermally and electrostatically actuated micromachined mirror
Author :
Nakahama, Masanori ; Sano, Hiroyasu ; Inoue, Shingo ; Sakaguchi, T. ; Matsutani, Akihiro ; Koyama, Fumio
Author_Institution :
Photonics Integration Syst. Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
We demonstrate the wavelength tuning of 850nm-GaAs-VCSELs with a controlled temperature dependence of wavelengths using a thermally and electrostatically actuated MEMS structure. The wavelength tuning and the control of the temperature dependence are independently realized. The result indicates a possibility of realizing tunable and athermal VCSELs with engineerd temperature dependence.
Keywords :
III-V semiconductors; gallium arsenide; laser cavity resonators; laser mirrors; laser tuning; micro-optomechanical devices; micromirrors; semiconductor lasers; surface emitting lasers; GaAs; MEMS VCSEL; athermal VCSEL; controlled temperature dependence; electrostatically actuated micromachined mirror; thermally actuated micromachined mirror; tunable VCSEL; wavelength 850 nm; wavelength tuning; Laser tuning; Micromechanical devices; Mirrors; Temperature dependence; Temperature measurement; Vertical cavity surface emitting lasers;
Conference_Titel :
Microoptics Conference (MOC), 2013 18th
Conference_Location :
Tokyo
