DocumentCode
675213
Title
Characterization and analysis of the roughness induced double-dip spectrum of SOI micro-ring resonator
Author
Chun-Yen Chen ; Chih-Wei Tsai ; Chih-Wei Tseng ; Cheng-Yu Wang ; Hsiang-Ting Lin ; Yung-Jui Chen
Author_Institution
Dept. of Photonics, Nat. Sun Yat-sen Univ., Kaohsiung, Taiwan
fYear
2013
fDate
27-30 Oct. 2013
Firstpage
1
Lastpage
2
Abstract
Backscattering due to roughness is evident from the presence of a double-dip in micro-ring filter spectrum. We present both experimental and theoretical studies, based on a generalized ring model including the backscattering effect to provide an accurate analysis of the ring properties that shed light on the surface roughness due to fabrication.
Keywords
micro-optomechanical devices; micromechanical resonators; optical fabrication; optical filters; silicon-on-insulator; surface roughness; SOI microring resonator; Si; backscattering effect; generalized ring model; microring filter spectrum; optical fabrication; roughness induced double-dip spectrum; surface roughness; Backscatter; Couplings; Optical ring resonators; Propagation losses; Reflection coefficient; Scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Microoptics Conference (MOC), 2013 18th
Conference_Location
Tokyo
Type
conf
Filename
6715108
Link To Document