Title :
Characterization and analysis of the roughness induced double-dip spectrum of SOI micro-ring resonator
Author :
Chun-Yen Chen ; Chih-Wei Tsai ; Chih-Wei Tseng ; Cheng-Yu Wang ; Hsiang-Ting Lin ; Yung-Jui Chen
Author_Institution :
Dept. of Photonics, Nat. Sun Yat-sen Univ., Kaohsiung, Taiwan
Abstract :
Backscattering due to roughness is evident from the presence of a double-dip in micro-ring filter spectrum. We present both experimental and theoretical studies, based on a generalized ring model including the backscattering effect to provide an accurate analysis of the ring properties that shed light on the surface roughness due to fabrication.
Keywords :
micro-optomechanical devices; micromechanical resonators; optical fabrication; optical filters; silicon-on-insulator; surface roughness; SOI microring resonator; Si; backscattering effect; generalized ring model; microring filter spectrum; optical fabrication; roughness induced double-dip spectrum; surface roughness; Backscatter; Couplings; Optical ring resonators; Propagation losses; Reflection coefficient; Scattering;
Conference_Titel :
Microoptics Conference (MOC), 2013 18th
Conference_Location :
Tokyo
