Title :
Optical waveguide resonator for one-port refractive index sensing
Author :
Fujiwara, N. ; Okayama, Hideaki ; Irikawa, H. ; Ooka, T. ; Tsutsui, Minoru ; Nakajima, Hiromasa
Author_Institution :
Waseda Univ., Tokyo, Japan
Abstract :
We report an optical waveguide sensor using ring resonator. A refractive index sensor using resonator with vertical light input will be described. A grating coupler is used to couple the light beam to waveguide and output the light beam. The device has diameter of 40 μm with 500 nm wide waveguide, and fabricated in silicon on insulator (SOI). Experiments show that it has 313 nm/RIU sensitivity and detection limit of 1.5×10-3 RIU for changes in the refractive index of the sample.
Keywords :
diffraction gratings; elemental semiconductors; optical couplers; optical fabrication; optical resonators; optical sensors; optical waveguides; refractive index measurement; silicon; silicon compounds; silicon-on-insulator; SOI; Si-SiO2; grating coupler; light beam; one-port refractive index sensing; optical fabrication; optical waveguide resonator; optical waveguide sensor; ring resonator; silicon-on-insulator; size 40 mum; size 500 nm; vertical light input; Couplers; Gratings; Optical ring resonators; Optical sensors; Optical waveguides; Refractive index; Silicon;
Conference_Titel :
Microoptics Conference (MOC), 2013 18th
Conference_Location :
Tokyo
