Title :
Fabrication of Mgo:LiNbO3 thin film ridge waveguide by surface-activated bonding and ion slicing
Author :
Tanaka, Kiyoshi ; Suhara, Toshiaki
Author_Institution :
Grad. Sch. of Eng., Osaka Univ., Suita, Japan
Abstract :
We report the fabrication of MgO:LiNbO3 waveguides by surface-activated bonding with Au layers and ion slicing. He+ ions were used for implantation. The films of 1 μm thickness were obtained on SiO2/Au layers. The ridge waveguides are also demonstrated. We achieved strong optical confinement at 1550 nm wavelength.
Keywords :
gold; helium; ion implantation; lithium compounds; magnesium compounds; optical fabrication; optical films; optical waveguides; ridge waveguides; silicon compounds; LiNbO3:MgO-Au-SiO2; ion implantation; ion slicing; optical confinement; size 1 mum; surface-activated bonding; thin film ridge waveguide; wavelength 1550 nm; Bonding; Crystals; Gold; Optical device fabrication; Optical surface waves; Optical waveguides;
Conference_Titel :
Microoptics Conference (MOC), 2013 18th
Conference_Location :
Tokyo
